爱发科ulvac低温泵CRYO-U10H维护保养
日本爱发科ULVAC低温泵：CRYO-U4H;CRYO-U6H;CRYO-U8H;CRYO-U8H-U;CRYO-U8HSP;CRYO-U10H;CRYO-U12H; CRYO-U12HSP;CRYO-U16;CRYO-U16P;CRYO-U20P;CRYO-U22H;CRYO-U30H；CRYO-TORR8;CRYO-TORR10；CRYO-U8HL;CRYO-U12HL
日本爱发科ULVAC分子泵：UTM-50;UTM-150;UTM-300;UTM-500；UTM-350FH;UTM-480FH;UTM-800FH;UTM-1001FH;UTM-3303FH;UTM-6300FH；UTM-350FW;UTM-480FW;UTM-800FW;UTM-1001FW;UTM-1400FW;UTM-2300FW;UTM-3001FW
日本爱发科ULVAC干泵：LR/HR60;LR/HR90;LR180;LR421;LR421-T;UR421-T;LR/HR300;LR/HR600;UR600；LR/HR1200;UR1200;LR180;UR180;LR3601;LR3601-T(TT);LR3601-R;LR3601-TR(TTR);UR3601-TT；ES10；DAP-6D;DAP-12S;DA-15D;DA-30S；DA-30D;DA-60S;DAT-50D;DAT-100S；DA-20D;DA-40S;DA-41D;DA-81S；DA60D;DA120S;DA-121D;DA241S；DAM-010;DAU-20;DAU-100;MD4UNT;MD8；DTC-22;DTC-41;DTC-60;DTC-120；DOP-40D;DOP-80S;DOP-80SP；DOP-300SA;DOP-420SA；DIS-90;DIS-251;DIS-501
日本爱发科ULVAC油扩散泵：PBL-02;PBL-04;PBL-06;PBL-10;PBL-14;PBL-20；ULK-04A;ULK-06A;ULK-10A;ULK-14A；PFL-22;PFL-22(TM);PFL-36;PFL-52
日本爱发科ULVAC油回转泵：VD151,VD201,VD301,VD401,VD601,VD901；VS1501;VS2401；PVD-180(B),PVD-360(B)；PKS-016,PKS030,PKS-070